High purity pressure 2-stage regulator designed for noncorrosive analytical and process applications requiring precise, stable, delivery pressure control. The two-stage design yields a delivery pressure change of less than 0.04/100 psi inlet change. Convoluted stainless steel diaphragms provide excellent regulating characteristics and allow for internal vacuum purging. The metal-to-metal diaphragm seal prevents contamination by eliminating the need for a soft seal and provides a leak-rate design of less than 2 x 10-8 ccs helium. This minimizes cleanup time in vacuum purging and yields lower residual contaminant levels. A diaphragm packless outlet valve with a Â¼" SwagelokÂ® fitting is provided for flow control and to maintain system purity. Captured bonnet ports with optional vent adaptors are standard on both stages and allow for the venting of hazardous gases in the event of diaphragm failure. These regulators are ultrasonically cleaned for the most demanding high-purity service.